1.1 This practice covers the determination of the particle concentration, by number, and the size distribution of airborne particles in dust-controlled areas and clean rooms, for particles in the size range of approximately 0.01 to 5.0 μm. Particle concentrations not exceeding 3.5 × 10⁶ particles/m ³ (100 000/ft³) are covered for all particles equal to and larger than the minimum size measured.

Product Details

Published:

10/01/2015

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6

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1 file , 89 KB