Description

This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.

Product Details

Published:

07/01/2009

ISBN(s):

9780978786885

Number of Pages:

24

File Size:

1 file , 600 KB