Description

JIS B 9920-2:2019 describes the monitoring to assure that a cleanroom or clean zone performs and maintains the required control of air cleanliness by particle concentration. Also, this Standard specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

Product Details

Published:

01/01/2019

Number of Pages:

21

File Size:

1 file , 180 KB